Application of Vacuum Annealing Furnaces: Manufacturing Vapor Chambers

2026-08-20 14:39

A vacuum annealing furnace is used in vapor chamber manufacturing to provide controlled heat treatment for chamber plates and related components. By combining precise temperature control with a clean vacuum environment, vacuum annealing can help relieve residual stress from plate fabrication, reduce exposure to oxygen and other reactive gases, and remove moisture and volatile contaminants from components before subsequent assembly and sealing. These conditions are particularly important for vapor chambers, where the internal wick structure, chamber cleanliness, and sealed vacuum environment directly affect thermal performance and reliability.

In vapor chamber manufacturing, vacuum annealing helps prepare copper or other compatible metal components for subsequent processing by improving material stability and maintaining a clean surface condition. Precise heating and controlled cooling can reduce thermal stress and deformation, while the vacuum environment minimizes oxidation during heat treatment. Because vapor chambers rely on a sealed internal chamber, working fluid, and capillary wick structure to transfer heat through phase change, controlling contamination and material condition during manufacturing is essential for consistent thermal performance.

Copper vapor chamber plates subjected to vacuum annealing to relieve residual stress and ensure clean surface conditions.

SIMUWU’s RVA-8816 annealing furnace features high-end specifications—including a diffusion pump and a high-temperature molybdenum heating chamber—enabling a high-quality, efficient, and fully automated vacuum annealing process. Its specific parameters are as follows:

Furnace Type	Horizontal type,single chamber, internal recycle
Loading method	Front Loading
Max. Loading size	800×800×1600 (W×H×L mm)
Max. Loading weight	1000kg(Including Jig)
Power supply	3 Phase, 380V(±5%); 50Hz
Max design temp.	1250 ℃
Typical Working temp.	600-1200 ℃
Temperature uniformity	±5 ℃ (9 points temp testing;Standard AMS2750E)
Temperature controller accuracy	S Type thermocouple ≤ ±1℃
Temperature control instrument accuracy	≤ 0.1℃
Quantity of heating zones	5-Zone independent temperature control
Heating element	Molybdenum
Heating rate(from 150-1200℃)	≤ 60 min
Empty furnace heating rate	0~25 ℃ /min(speed adjustable)
Ultimate vacuum	7.0 x 10-6 mbar(cold empty furnace condition, after fully drying the furnace)
Working vacuum	1.0 x 10-3 pa
Time required to reach working vacuum	≤ 40 min (after preheating by the diffusion pump, empty furnace, cold state)
Pressure rising rate	≤0.67 pa/h (cold empty furnace condition)
Cooling method	Air cooling/natural cooling
Cooling air	Nitrogen/Argon (purity: 99.99% or 99.999%)
Max charging pressure(absolute pressure)	＜2 bar
Partial pressure	50-1000 Pa manual and automatic pressure control
Operate method	manual or automatic control
Equipment color	Customized